Various supercritical CO₂ testing apparatus
Customized for a wide variety of uses
The following is a list of the various types of apparatus we have worked on.
Wafer Cleaning Processor
![](https://www.itec-es.co.jp/en/wordpress/wp-content/uploads/2021/04/img_pro_co2_05_01.jpg)
Design pressure | 25MPa |
Design temperature | 100℃ |
Volume | 7L |
Supercritical CO₂ surface treatment apparatus
![](https://www.itec-es.co.jp/en/wordpress/wp-content/uploads/2021/04/img_pro_co2_05_02.jpg)
Design pressure | 15MPa |
Design temperature | 120℃ |
Volume | 7L |
Supercritical CO₂ surface treatment apparatus
![](https://www.itec-es.co.jp/en/wordpress/wp-content/uploads/2021/04/img_pro_co2_05_03.jpg)
Design pressure | 15MPa |
Design temperature | 100℃ |
Volume | 20L |
Supercritical CO₂ surface treatment apparatus
![](https://www.itec-es.co.jp/en/wordpress/wp-content/uploads/2021/04/img_pro_co2_05_04.jpg)
Design pressure | 15MPa |
Design temperature | 100℃ |
Volume | 0.43L |
Dry cleaning apparatus
![](https://www.itec-es.co.jp/en/wordpress/wp-content/uploads/2021/04/img_pro_co2_05_05.jpg)
Design pressure | 12MPa |
Design temperature | 60℃ |
Volume | 112L |
Silicon wafer cleaning test apparatus
![](https://www.itec-es.co.jp/en/wordpress/wp-content/uploads/2021/04/img_pro_co2_05_06.jpg)
Design pressure | 34MPa |
Design temperature | 100℃ |
Volume | 20ml |
Multi-use testing apparatus
![](https://www.itec-es.co.jp/en/wordpress/wp-content/uploads/2021/04/img_pro_co2_05_07.jpg)
Design pressure | 29MPa |
Design temperature | 150℃ |
Volume | 300ml |
Supercritical CO₂ gas turbine cycle test apparatus
![](https://www.itec-es.co.jp/en/wordpress/wp-content/uploads/2021/04/img_pro_co2_05_08.jpg)
Design pressure | 15MPa |
Design temperature | 350℃ |
Flow rate | 646kg/Hr |
Supercritical CO₂ corrosion testing Equipment
![](https://www.itec-es.co.jp/en/wordpress/wp-content/uploads/2021/04/img_pro_co2_05_09.jpg)
Design pressure | 15MPa |
Design temperature | 650℃ |
Flow rate | 6kg/hr |
Heat exchanger two-phase flow test apparatus
![](https://www.itec-es.co.jp/en/wordpress/wp-content/uploads/2021/04/img_pro_co2_05_10.jpg)
Design pressure | 15MPa |
Design temperature | 50℃ |
Flow rate | 6kg/hr |