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Various supercritical CO₂ testing apparatus

Customized for a wide variety of uses

The following is a list of the various types of apparatus we have worked on.

Wafer Cleaning Processor

Apparatus for performing supercritical treatment tests on anodized aluminum.
Design pressure25MPa
Design temperature100℃
Volume7L

Supercritical CO₂ surface treatment apparatus

Supercritical plating apparatus
Design pressure15MPa
Design temperature120℃
Volume7L

Supercritical CO₂ surface treatment apparatus

Supercritical plating apparatus
Design pressure15MPa
Design temperature100℃
Volume20L

Supercritical CO₂ surface treatment apparatus

Supercritical plating apparatus
Design pressure15MPa
Design temperature100℃
Volume0.43L

Dry cleaning apparatus

Supercritical dry cleaning apparatus
Design pressure12MPa
Design temperature60℃
Volume112L

Silicon wafer cleaning test apparatus

Supercritical silicon wafer cleaning apparatus
Design pressure34MPa
Design temperature100℃
Volume20ml

Multi-use testing apparatus

Supercritical testing apparatus
Design pressure29MPa
Design temperature150℃
Volume300ml

Supercritical CO₂ gas turbine cycle test apparatus

Loop-type testing apparatus for measuring heat exchanger performance near the critical point
Design pressure15MPa
Design temperature350℃
Flow rate646kg/Hr

Supercritical CO₂ corrosion testing Equipment

Equipment for verifying metal corrosion under supercritical conditions
Design pressure15MPa
Design temperature650℃
Flow rate6kg/hr

Heat exchanger two-phase flow test apparatus

Apparatus to verify the behavior of CO₂ in a heat exchanger near the critical point
Design pressure15MPa
Design temperature50℃
Flow rate6kg/hr

Supercritical CO₂ extraction SystemOur product

Supercritical CO₂ extraction System - La...

Supercritical CO₂ extraction System - Pi...

Supercritical CO₂ extraction System - Co...

Supercritical CO₂ cleaning system

Various supercritical CO₂ testing appara...

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